Invention Grant
US08035159B2 Device structure and manufacturing method using HDP deposited source-body implant block
有权
使用HDP沉积源体植入块的装置结构和制造方法
- Patent Title: Device structure and manufacturing method using HDP deposited source-body implant block
- Patent Title (中): 使用HDP沉积源体植入块的装置结构和制造方法
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Application No.: US11796985Application Date: 2007-04-30
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Publication No.: US08035159B2Publication Date: 2011-10-11
- Inventor: Anup Bhalla , François Hébert , Sung-Shan Tai , Sik K Lui
- Applicant: Anup Bhalla , François Hébert , Sung-Shan Tai , Sik K Lui
- Applicant Address: BM
- Assignee: Alpha & Omega Semiconductor, Ltd.
- Current Assignee: Alpha & Omega Semiconductor, Ltd.
- Current Assignee Address: BM
- Agent Bo-In Lin
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/336

Abstract:
This invention discloses a semiconductor power device. The trenched semiconductor power device includes a trenched gate, opened from a top surface of a semiconductor substrate, surrounded by a source region encompassed in a body region near the top surface above a drain region disposed on a bottom surface of a substrate. The semiconductor power device further includes an implanting-ion block disposed above the top surface on a mesa area next to the body region having a thickness substantially larger than 0.3 micron for blocking body implanting ions and source ions from entering into the substrate under the mesa area whereby masks for manufacturing the semiconductor power device can be reduced.
Public/Granted literature
- US20080265289A1 Device structure and manufacturing method using HDP deposited source-body implant block Public/Granted day:2008-10-30
Information query
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