Invention Grant
- Patent Title: Physical quantity detecting sensor and actuator
- Patent Title (中): 物理量检测传感器和执行器
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Application No.: US12963222Application Date: 2010-12-08
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Publication No.: US08035281B2Publication Date: 2011-10-11
- Inventor: Kenji Shibata , Fumihito Oka
- Applicant: Kenji Shibata , Fumihito Oka
- Applicant Address: JP Tokyo
- Assignee: Hitachi Cable, Ltd.
- Current Assignee: Hitachi Cable, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2008-013973 20080124
- Main IPC: H01L41/187
- IPC: H01L41/187
Abstract:
A sensor for detecting a physical quantity includes a piezoelectric thin film device having a lower electrode, a piezoelectric thin film and an upper electrode, and a voltage detecting device connected between the lower and upper electrodes of the piezoelectric thin film device. The piezoelectric thin film is formed of an alkali niobium oxide-based perovskite material expressed by (K1-xNax)NbO3 (0
Public/Granted literature
- US20110074251A1 Piezoelectric Thin Film Device Public/Granted day:2011-03-31
Information query
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