Invention Grant
- Patent Title: Transistors having a channel region between channel-portion holes and methods of forming the same
- Patent Title (中): 在通道部分孔之间具有沟道区的晶体管及其形成方法
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Application No.: US12345415Application Date: 2008-12-29
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Publication No.: US08039895B2Publication Date: 2011-10-18
- Inventor: Jin-Woo Lee , Tae-Young Chung , Yong-Sung Kim
- Applicant: Jin-Woo Lee , Tae-Young Chung , Yong-Sung Kim
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR2004-9776 20040213
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
According to some embodiments of the invention, transistors have channel regions between channel-portion holes. Methods of forming the same include at least two channel-portion holes disposed in a semiconductor substrate. Line patterns are formed in parallel to be spaced apart from each other on a main surface of the semiconductor substrate to fill the channel-portion holes. A channel region is disposed in the semiconductor substrate below the line patterns. At this time, the channel region is formed between the channel-portion holes and also covers lower portions of the channel-portion holes. Driving current capability and refresh characteristics of DRAMs utilizing the inventive transistors are improved.
Public/Granted literature
- US20090114967A1 TRANSISTORS HAVING A CHANNEL REGION BETWEEN CHANNEL-PORTION HOLES AND METHODS OF FORMING THE SAME Public/Granted day:2009-05-07
Information query
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