Invention Grant
US08039950B2 Solder material lining a cover wafer attached to wafer substrate
有权
焊接材料衬在附着于晶片衬底的盖子晶片上
- Patent Title: Solder material lining a cover wafer attached to wafer substrate
- Patent Title (中): 焊接材料衬在附着于晶片衬底的盖子晶片上
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Application No.: US12092892Application Date: 2006-11-08
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Publication No.: US08039950B2Publication Date: 2011-10-18
- Inventor: Marten Oldsen , Wolfgang Reinert , Peter Merz
- Applicant: Marten Oldsen , Wolfgang Reinert , Peter Merz
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- Current Assignee Address: DE Munich
- Agency: Arent Fox LLP
- Priority: DE102005053722 20051110
- International Application: PCT/EP2006/068252 WO 20061108
- International Announcement: WO2007/054524 WO 20070518
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/30

Abstract:
The invention relates to a cover wafer with a core and with an inside, whereby the inside has one or more annular outer areas, (an) annular area(s), which inwardly adjoin(s) the outer area(s), and has (a) inner area(s), and to a component cover with only one annular outer area on its inside. The invention is characterized in that at least area(s) has/have a buffer layer, which has a wetting angle of 265° C. to 450° C. The invention also relates to a component cover having one of the areas which has said buffer layer in a comparable manner. The invention additionally relates to a wafer component or to a component, which can be inserted using microsystem technology and which has a cover wafer or component cover applied with the aid of a solder material, and to a method for the production thereof.
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