Invention Grant
US08040138B2 Planar type frequency shift probe for measuring plasma electron densities and method and apparatus for measuring plasma electron densities
失效
用于测量等离子体电子密度的平面型频移探头和用于测量等离子体电子密度的方法和装置
- Patent Title: Planar type frequency shift probe for measuring plasma electron densities and method and apparatus for measuring plasma electron densities
- Patent Title (中): 用于测量等离子体电子密度的平面型频移探头和用于测量等离子体电子密度的方法和装置
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Application No.: US12065018Application Date: 2006-08-25
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Publication No.: US08040138B2Publication Date: 2011-10-18
- Inventor: Hideo Sugai , So Yajima , Keiji Nakamura
- Applicant: Hideo Sugai , So Yajima , Keiji Nakamura
- Applicant Address: JP Nagoya-shi
- Assignee: National University Corporation Nagoya University
- Current Assignee: National University Corporation Nagoya University
- Current Assignee Address: JP Nagoya-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-252525 20050831
- International Application: PCT/JP2006/317298 WO 20060825
- International Announcement: WO2007/026859 WO 20070308
- Main IPC: G01N27/62
- IPC: G01N27/62
Abstract:
A planar type frequency shift probe that utilizes resonance of electromagnetic waves and includes a main body with a conductor plate and a coaxial cable. The main body includes a long narrow space, which has predetermined width and length and has an opening on the periphery of the main body, as well as the first surface part and the second surface part. The surface conductor of the coaxial cable is connected to the first surface part while the core conductor of the coaxial cable is connected to the second surface part via a lead wire.
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