Invention Grant
- Patent Title: Probe card cassette and probe card
- Patent Title (中): 探针卡片和探针卡
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Application No.: US12878554Application Date: 2010-09-09
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Publication No.: US08040147B2Publication Date: 2011-10-18
- Inventor: Shiro Nozaki , Takashi Ohtori , Kenichi Tsunogaki
- Applicant: Shiro Nozaki , Takashi Ohtori , Kenichi Tsunogaki
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2006-217226 20060809
- Main IPC: G01R31/00
- IPC: G01R31/00

Abstract:
A holding section (2) holds a probe card (1). Transport mechanisms (3a to 3d) have the function of transporting the probe card (1) from the holding section (2). A lock mechanism (4) is provided for the transport mechanism (3d). When the probe card cassette is placed in prober equipment, the lock mechanism (4) is released to allow the probe card (1) to be transported from the holding section (2) by the transport mechanisms (3a to 3d). When the probe card cassette is not placed in the prober equipment, the lock mechanism (4) operates to fix the probe card (1) in the holding section (2).
Public/Granted literature
- US20110006798A1 PROBE CARD CASSETTE AND PROBE CARD Public/Granted day:2011-01-13
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