Invention Grant
US08040639B2 Integrated silicon micro-actuator slider 有权
集成硅微致动器滑块

Integrated silicon micro-actuator slider
Abstract:
An integrated microactuator slider. The microactuator includes a substrate having a fixed portion and a moveable portion. The microactuator also includes a slider communicatively integrated within the moveable portion of the substrate. The slider includes a read/write head for reading data from or writing data to a data storage device. The microactuator further includes a force generator communicatively integrated within the substrate. The force generator is for causing movement of the moveable portion of the substrate.
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