Invention Grant
- Patent Title: Card type MEMS microphone
- Patent Title (中): 卡式MEMS麦克风
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Application No.: US12298243Application Date: 2007-03-20
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Publication No.: US08041064B2Publication Date: 2011-10-18
- Inventor: Norio Kimura
- Applicant: Norio Kimura
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2006-130299 20060509
- International Application: PCT/JP2007/055758 WO 20070320
- International Announcement: WO2007/129507 WO 20071115
- Main IPC: H04R1/20
- IPC: H04R1/20 ; H01L29/84

Abstract:
It is an object of the invention to provide an MEMS microphone having a directionality. A card type MEMS microphone according to the invention comprises a substrate having a first through hole and a second through hole, an MEMS chip in which a space formed by a diaphragm electrode and a silicon substrate is mounted in a position to surround an outlet of the first through hole and which serves to convert a sound signal propagated to the diaphragm electrode into an electric signal, and an acoustic resisting member mounted in a position covering the first through hole at a substrate surface on an opposite side to a side on which the MEMS chip is mounted, and the substrate has a terminal for transmitting an electric signal output from the MEMS chip to an electronic apparatus and takes a shape of a card which can be attached to and removed from the electronic apparatus, and the second through hole is a hole which a sound signal passes to be propagated to the diaphragm electrode around the substrate.
Public/Granted literature
- US20090161894A1 CARD TYPE MEMS MICROPHONE Public/Granted day:2009-06-25
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