Invention Grant
US08041440B2 Method and system for providing a selection of golden tools for better defect density and product yield
有权
提供选择金黄工具的方法和系统，以提高缺陷密度和产品产量
- Patent Title: Method and system for providing a selection of golden tools for better defect density and product yield
- Patent Title (中): 提供选择金黄工具的方法和系统，以提高缺陷密度和产品产量
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Application No.: US11683305Application Date: 2007-03-07
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Publication No.: US08041440B2Publication Date: 2011-10-18
- Inventor: Chang Yung Cheng , Hsueh-Shih Fu , Ying-Lang Wang , Chin-Kun Wang
- Applicant: Chang Yung Cheng , Hsueh-Shih Fu , Ying-Lang Wang , Chin-Kun Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G06F17/50 ; G06Q10/00
Abstract:
Aspects of the present disclosure provide a method and a system for providing a selection of golden tools for better defect density and product yield. A golden tool selection and dispatching system is provided to integrate different components for robust golden tool selection and dispatching. The golden tool selection system selects a set of golden tools based on performance of a set of manufacturing tools and provides a fully automated operational environment to produce a product using the set of golden tools.
Public/Granted literature
- US20080021585A1 Method and System for Providing a Selection of Golden Tools for Better Defect Density and Product Yield Public/Granted day:2008-01-24
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