Invention Grant
- Patent Title: Power supply ignition system and method
- Patent Title (中): 电源点火系统及方法
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Application No.: US12424138Application Date: 2009-04-15
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Publication No.: US08044594B2Publication Date: 2011-10-25
- Inventor: Forrest Morgan , Daryl Frost , Frank Heine , Doug Pelleymounter , Hendrik Walde
- Applicant: Forrest Morgan , Daryl Frost , Frank Heine , Doug Pelleymounter , Hendrik Walde
- Applicant Address: US CO Fort Collins
- Assignee: Advanced Energy Industries, Inc.
- Current Assignee: Advanced Energy Industries, Inc.
- Current Assignee Address: US CO Fort Collins
- Agency: Neugeboren O'Dowd PC
- Main IPC: H01J7/24
- IPC: H01J7/24

Abstract:
One embodiment comprises a plasma processing system having a plasma chamber, a generator, a feedback component, and a controller. The feedback component is adapted to receive at least one first signal having a level dependent upon the power signal supplied from the generator to the chamber. A feedback output is adapted to emit a second signal to the controller, which is adapted to supply a third signal to the power generator. The third signal is configured to control the power generator to supply the power signal at a power level for a particular processing application. The power generator is further controlled by the controller to one of reduce and remove power from the plasma processing chamber and subsequently increase the voltage level until the power level reaches a threshold level. The power generator is further controlled to subsequently modulate the voltage until the voltage returns to a first voltage level.
Public/Granted literature
- US20100026186A1 POWER SUPPLY IGNITION SYSTEM AND METHOD Public/Granted day:2010-02-04
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