Invention Grant
- Patent Title: Operating a plasma process
- Patent Title (中): 操作等离子体工艺
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Application No.: US12471769Application Date: 2009-05-26
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Publication No.: US08044595B2Publication Date: 2011-10-25
- Inventor: Moritz Nitschke
- Applicant: Moritz Nitschke
- Applicant Address: DE Freiburg
- Assignee: HUETTINGER Elektronik GmbH + Co. KG
- Current Assignee: HUETTINGER Elektronik GmbH + Co. KG
- Current Assignee Address: DE Freiburg
- Agency: Fish & Richardson P.C.
- Priority: EP06024306 20061123
- Main IPC: C23C14/34
- IPC: C23C14/34

Abstract:
A method for operating one or more plasma processes in a plasma chamber, with at least two power supplies, the method comprising the following process steps: a. carrying out an arc detection for at least one of the power supplies; b. generating at least one signal relating to the arc detection and/or data relating to the arc detection; transferring the at least one signal and/or the data to a plasma process-regulating device and/or to one or more other power supplies or to one or more of the arc diverter devices associated with the other power supplies.
Public/Granted literature
- US20090289034A1 Operating a Plasma Process Public/Granted day:2009-11-26
Information query
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