Invention Grant
US08044929B2 Analog data-input device provided with a pressure sensor of a microelectromechanical type
有权
具有微机电类型的压力传感器的模拟数据输入装置
- Patent Title: Analog data-input device provided with a pressure sensor of a microelectromechanical type
- Patent Title (中): 具有微机电类型的压力传感器的模拟数据输入装置
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Application No.: US11393377Application Date: 2006-03-30
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Publication No.: US08044929B2Publication Date: 2011-10-25
- Inventor: Lorenzo Baldo , Chantal Combi , Simone Sassolini , Marco Del Sarto
- Applicant: Lorenzo Baldo , Chantal Combi , Simone Sassolini , Marco Del Sarto
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; Harold H. Bennett, II
- Priority: EP05425183 20050331
- Main IPC: G09G5/00
- IPC: G09G5/00

Abstract:
In a data-input device an actuator element that can be manually actuated, and a sensor mechanically coupled to the actuator element. The sensor is formed in a body of semiconductor material housing a first sensitive element, which detects the actuation of the actuator element and generates electrical control signals. The first sensitive element is a microelectromechanical pressure sensor, formed by: a cavity made within the body; a diaphragm made in a surface portion of the body and suspended above the cavity; and piezoresistive transducer elements integrated in peripheral surface portions of the diaphragm in order to detect its deformations upon actuation of the actuator element.
Public/Granted literature
- US20060262088A1 Analog data-input device provided with a pressure sensor of a microelectromechanical type Public/Granted day:2006-11-23
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