Invention Grant
- Patent Title: Acceleration sensor and method of fabricating it
- Patent Title (中): 加速度传感器及其制造方法
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Application No.: US12444426Application Date: 2008-05-16
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Publication No.: US08047076B2Publication Date: 2011-11-01
- Inventor: Yasuhiro Yoshikawa , Hiroyuki Tajiri
- Applicant: Yasuhiro Yoshikawa , Hiroyuki Tajiri
- Applicant Address: JP Kyoto
- Assignee: Rohm Co., Ltd.
- Current Assignee: Rohm Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Fish & Richardson P.C.
- Priority: JP2007-143571 20070530; JP2007-143576 20070530
- International Application: PCT/JP2008/059034 WO 20080516
- International Announcement: WO2008/146624 WO 20081204
- Main IPC: G01P15/125
- IPC: G01P15/125 ; H05K3/30 ; H01L29/82

Abstract:
Provided is an acceleration sensor that has high detection sensitivity and that can enhance production efficiency. The acceleration sensor has: a ceramic substrate made of Al2O3; a ferroelectric layer formed in a predetermined area on the ceramic substrate by screen printing, the ferroelectric layer being made of BaTiO3; a proof mass disposed so as to face the ferroelectric layer, the proof mass being formed at a predetermined distance d from the ferroelectric layer; and a first electrode and a second electrode that are formed on that side of the proof mass which faces the ferroelectric layer, so as to be fixed thereto. The first electrode and the second electrode are each formed in the shape of comb teeth, and comb tooth portions and thereof are arranged in an alternating manner.
Public/Granted literature
- US20100000324A1 ACCELERATION SENSOR AND METHOD OF FABRICATING IT Public/Granted day:2010-01-07
Information query
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