Invention Grant
- Patent Title: Method for room temperature chemical vapor deposition on flexible polymer substrates
- Patent Title (中): 柔性聚合物基材上室温化学气相沉积的方法
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Application No.: US11783048Application Date: 2007-04-05
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Publication No.: US08048483B2Publication Date: 2011-11-01
- Inventor: Soon-Gil Yoon , Nak-Jin Seong , Sang-Yong Jeon
- Applicant: Soon-Gil Yoon , Nak-Jin Seong , Sang-Yong Jeon
- Applicant Address: KR Daejeon
- Assignee: The Industry & Academic Cooperation in Chungnam National University (IAC)
- Current Assignee: The Industry & Academic Cooperation in Chungnam National University (IAC)
- Current Assignee Address: KR Daejeon
- Agency: Edwards Angell Palmer & Dodge LLP
- Agent Kongsik Kim
- Priority: KR10-2007-0014346 20070212
- Main IPC: B05D3/00
- IPC: B05D3/00
Abstract:
A method to deposit a thin film on a flexible polymer substrate at room temperature comprising heating source vapor, which is vaporized by an evaporator, in a shower head in a reaction chamber so that the source vapor is thermally decomposed to be converted into the nano-size single phase; and depositing the source vapor in the nano-size single phase on the flexible polymer substrate which is not separately heated.
Public/Granted literature
- US20080193642A1 Method for room temperature chemical vapor deposition on flexible polymer substrates Public/Granted day:2008-08-14
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