Invention Grant
- Patent Title: Photomask
- Patent Title (中): 光掩模
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Application No.: US12494234Application Date: 2009-06-29
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Publication No.: US08048592B2Publication Date: 2011-11-01
- Inventor: Dae Jin Park
- Applicant: Dae Jin Park
- Applicant Address: KR Icheon
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2009-0012855 20090217
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
A photomask that includes an assistant pattern is provided. The photomask comprises a target pattern transcribed over a wafer by an exposing process, and an assistant pattern formed symmetrically with a main pattern of the target pattern based on the outer pattern of the target pattern, thereby minimizing the loss of the outer pattern and maximizing the process margin in the defocus environment.
Public/Granted literature
- US20100209824A1 PHOTOMASK Public/Granted day:2010-08-19
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