Invention Grant
US08048612B2 Polymer and chemically amplified resist composition comprising the same
有权
包含其的聚合物和化学增幅抗蚀剂组合物
- Patent Title: Polymer and chemically amplified resist composition comprising the same
- Patent Title (中): 包含其的聚合物和化学增幅抗蚀剂组合物
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Application No.: US12467683Application Date: 2009-05-18
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Publication No.: US08048612B2Publication Date: 2011-11-01
- Inventor: Yusuke Fuji , Mitsuhiro Hata
- Applicant: Yusuke Fuji , Mitsuhiro Hata
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2008-133405 20080521
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; C08F10/00

Abstract:
A polymer comprising a structural unit represented by the formula (Ia) or (Ib): wherein R1 represents a hydrogen atom etc., R2 represents a linear, branched chain or cyclic C1-C8 alkyl group, R3 represents a methyl group, n represents an integer of 0 to 14, Z1 represents a single bond etc., k represents an integer of 1 to 4, R4 and R5 each independently represents a hydrogen atom etc., and m represents an integer of 1 to 3, a structural unit represented by the formula (II): wherein R6 and R7 each independently represents a hydrogen atom etc., R8 represents a methyl group, R9 represents a hydrogen atom etc., n′ represents an integer of 0 to 12, Z2 represents a single bond etc., k′ represents an integer of 1 to 4, R21 and R22 each independently represents a hydrogen atom etc., and R23 represents a C1-C30 monovalent hydrocarbon group, and at least one structural unit selected from the group consisting of structural units represented by the formulae (IIIa), (IIIb), (IIIc), (IIId) and (IIIf) wherein R10 represents a hydrogen atom etc., R11 represents a methyl group, R12 is independently in each occurrence a carboxyl group etc., j represents an integer of 0 to 3, a represents an integer of 0 to 5, b represents an integer of 0 to 3, c represents an integer of 0 to (2j+2), Z3 represents a single bond etc., and k″ represents an integer of 1 to 4.
Public/Granted literature
- US20090317744A1 POLYMER AND CHEMICALLY AMPLIFIED RESIST COMPOSITION COMPRISING THE SAME Public/Granted day:2009-12-24
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