Invention Grant
US08048705B2 Method and structure for a CMOS image sensor using a triple gate process
有权
使用三栅极工艺的CMOS图像传感器的方法和结构
- Patent Title: Method and structure for a CMOS image sensor using a triple gate process
- Patent Title (中): 使用三栅极工艺的CMOS图像传感器的方法和结构
-
Application No.: US12258732Application Date: 2008-10-27
-
Publication No.: US08048705B2Publication Date: 2011-11-01
- Inventor: Jieguang Huo , Jianping Yang
- Applicant: Jieguang Huo , Jianping Yang
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN Shanghai
- Agency: Kilpatrick Townsend and Stockton LLP
- Priority: CN200810040741 20080715
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of forming a CMOS image sensor device, the method includes providing a semiconductor substrate having a P-type impurity characteristic including a surface region. The method forma first thickness of silicon dioxide in a first region of the surface region, a second thickness of silicon dioxide in a second region of the surface region, and a third thickness of silicon dioxide in a third region of the surface region. The method includes forming a first gate layer overlying the second region and a second gate layer overlying the third region, while exposing a portion of the first thickness of silicon dioxide. An N-type impurity characteristic is formed within a region within a vicinity underlying the first thickness of silicon dioxide in the first region of the surface region to cause formation of a photo diode device characterized by the N-type impurity region and the P-type substrate.
Public/Granted literature
- US20100015745A1 METHOD AND STRUCTURE FOR A CMOS IMAGE SENSOR USING A TRIPLE GATE PROCESS Public/Granted day:2010-01-21
Information query
IPC分类: