Invention Grant
US08048713B2 Process for manufacturing a CBRAM memory having enhanced reliability
有权
制造具有增强的可靠性的CBRAM存储器的工艺
- Patent Title: Process for manufacturing a CBRAM memory having enhanced reliability
- Patent Title (中): 制造具有增强的可靠性的CBRAM存储器的工艺
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Application No.: US12250045Application Date: 2008-10-13
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Publication No.: US08048713B2Publication Date: 2011-11-01
- Inventor: Véronique Sousa , Cyril Dressler
- Applicant: Véronique Sousa , Cyril Dressler
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Pearne & Gordon LLP
- Priority: FR0758363 20071016
- Main IPC: H01L21/06
- IPC: H01L21/06

Abstract:
The invention relates to a process for manufacturing a plurality of CBRAM memories, each comprising a memory cell in a chalcogenide solid electrolyte, an anode, and a cathode, the process comprising implementing a sublayer of a high thermal conductivity material, higher than 1.3 W/m/K, which covers the set of contacts, then providing, on said sublayer, a triple layer comprising a chalcogenide layer, then an anodic layer, and a layer with second contacts (36), and finally an etching step.
Public/Granted literature
- US20090098681A1 PROCESS FOR MANUFACTURING A CBRAM MEMORY HAVING ENHANCED RELIABILITY Public/Granted day:2009-04-16
Information query
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