Invention Grant
- Patent Title: Transistor including bulb-type recess channel and method for fabricating the same
- Patent Title (中): 包括灯泡型凹槽的晶体管及其制造方法
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Application No.: US11819888Application Date: 2007-06-29
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Publication No.: US08048742B2Publication Date: 2011-11-01
- Inventor: Kwan-Yong Lim , Hong-Seon Yang , Dong-Sun Sheen , Se-Aug Jang , Heung-Jae Cho , Yong-Soo Kim , Min-Gyu Sung , Tae-Yoon Kim
- Applicant: Kwan-Yong Lim , Hong-Seon Yang , Dong-Sun Sheen , Se-Aug Jang , Heung-Jae Cho , Yong-Soo Kim , Min-Gyu Sung , Tae-Yoon Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2006-0095171 20060928
- Main IPC: H01L21/8234
- IPC: H01L21/8234

Abstract:
A method for fabricating a transistor including a bulb-type recess channel includes forming a bulb-type recess pattern in a substrate, forming a gate insulating layer over the substrate and the bulb-type recess pattern, forming a first gate conductive layer over the gate insulating layer, forming a void movement blocking layer over the first gate conductive layer in the bulb-type recess pattern, and forming a second gate conductive layer over the void movement blocking layer and the first gate conductive layer.
Public/Granted literature
- US20080079093A1 Transistor including bulb-type recess channel and method for fabricating the same Public/Granted day:2008-04-03
Information query
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