Invention Grant
US08049152B2 Light irradiation apparatus and optical member having multiple reflecting sections and an antireflection film 有权
光照射装置和具有多个反射部分和抗反射膜的光学部件

  • Patent Title: Light irradiation apparatus and optical member having multiple reflecting sections and an antireflection film
  • Patent Title (中): 光照射装置和具有多个反射部分和抗反射膜的光学部件
  • Application No.: US12064702
    Application Date: 2006-08-24
  • Publication No.: US08049152B2
    Publication Date: 2011-11-01
  • Inventor: Mitsuru Saito
  • Applicant: Mitsuru Saito
  • Applicant Address: JP Kyoto, Kyoto
  • Assignee: CCS, Inc.
  • Current Assignee: CCS, Inc.
  • Current Assignee Address: JP Kyoto, Kyoto
  • Priority: JP2005-245800 20050826
  • International Application: PCT/JP2006/316608 WO 20060824
  • International Announcement: WO2007/023894 WO 20070301
  • Main IPC: H01L27/00
  • IPC: H01L27/00
Light irradiation apparatus and optical member having multiple reflecting sections and an antireflection film
Abstract:
The light irradiation device is provided that can reduce moire interference with a simple and low-cost arrangement without sacrificing a compact design by comprising a transparent plate 31 which has a predetermined thickness and one of whose surfaces is arranged as an object facing surface 31a to face an object W such as a product on which light is to be irradiated, multiple reflecting sections 32 that are laid out on other surface of the transparent plate 31 with forming a microscopic space S therebetween with its light reflecting surface facing a direction of the object W, a light source section 5 arranged at a position where at least a part of the emitted light is transmitted, reaches the light reflecting surface, is reflected on the light reflecting surface and is emitted from the object facing surface 31a, and an antireflection film 33 that covers the object facing surface 31a.
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