Invention Grant
US08049308B2 Bond pad for low K dielectric materials and method for manufacture for semiconductor devices
有权
用于低K电介质材料的焊盘和半导体器件的制造方法
- Patent Title: Bond pad for low K dielectric materials and method for manufacture for semiconductor devices
- Patent Title (中): 用于低K电介质材料的焊盘和半导体器件的制造方法
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Application No.: US11449902Application Date: 2006-06-09
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Publication No.: US08049308B2Publication Date: 2011-11-01
- Inventor: Xian J. Ning
- Applicant: Xian J. Ning
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN Shanghai
- Agency: Kilpatrick Townsend and Stockton LLP
- Priority: CN200510111133 20051130
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
A semiconductor device having an improved contact structure. The device has a semiconductor substrate and a plurality of gate structures formed on the substrate. The device has a first interlayer dielectric overlying the gate structures. The device has a first copper interconnect layer overlying the first interlayer dielectric layer. The device also has a first low K dielectric layer overlying the first copper interconnect layer. A second copper interconnect layer is overlying the low K dielectric layer. In between the first and second copper layers is a copper ring structure enclosing an entirety of an inner region of the first low K dielectric layer. In a preferred embodiment, the copper ring structure is provided between the first copper interconnect layer and the second copper interconnect layer to maintain the inner region of the first low K dielectric layer. A bonding pad structure is overlying a region within the inner region.
Public/Granted literature
- US20070122597A1 Bond pad for low K dielectric materials and method for manufacture for semiconductor devices Public/Granted day:2007-05-31
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