Invention Grant
- Patent Title: Silicon MEMS resonator devices and methods
- Patent Title (中): 硅MEMS谐振器装置及方法
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Application No.: US12193780Application Date: 2008-08-19
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Publication No.: US08049490B2Publication Date: 2011-11-01
- Inventor: Markus Loehndorf , Wolfgang Raberg , Florian Schoen
- Applicant: Markus Loehndorf , Wolfgang Raberg , Florian Schoen
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Patterson Thuente Christensen Pedersen, P.A.
- Main IPC: G01R33/09
- IPC: G01R33/09
Abstract:
Embodiments of the invention are related to MEMS devices and methods. In one embodiment, a MEMS device includes a resonator element comprising a magnetic portion having a fixed magnetization, and at least one sensor element comprising a magnetoresistive portion, wherein a magnetization and a resistivity of the magnetoresistive portion vary according to a proximity of the magnetic portion.
Public/Granted literature
- US20100045274A1 SILICON MEMS RESONATOR DEVICES AND METHODS Public/Granted day:2010-02-25
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