Invention Grant
- Patent Title: Piezoelectric filter and method for manufacturing the same
- Patent Title (中): 压电式滤波器及其制造方法
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Application No.: US12523798Application Date: 2008-11-19
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Publication No.: US08049581B2Publication Date: 2011-11-01
- Inventor: Tomohiro Iwasaki , Hiroshi Nakatsuka , Keiji Onishi
- Applicant: Tomohiro Iwasaki , Hiroshi Nakatsuka , Keiji Onishi
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2007-301114 20071121
- International Application: PCT/JP2008/003377 WO 20081119
- International Announcement: WO2009/066448 WO 20090528
- Main IPC: H03H9/205
- IPC: H03H9/205 ; H01L41/04

Abstract:
A piezoelectric filter of the present invention is provided with first and second piezoelectric vibrators, each having a substrate, a lower load film formed on the substrate, a lower electrode formed on the lower load film, a piezoelectric element formed on the lower electrode, an upper electrode formed on the piezoelectric element and an upper load film formed on the upper electrode, and the piezoelectric filter is configured by electrically connecting the first and second piezoelectric vibrators to each other, and the piezoelectric element of the first piezoelectric vibrator and the piezoelectric element of the second piezoelectric vibrator correspond to respectively different areas of the same piezoelectric element; thus, the resonance frequencies of the first and second piezoelectric vibrators are adjusted by the respective lower load films and upper load films of the first piezoelectric vibrator and the second piezoelectric vibrator so that the resonance frequencies of the first and second piezoelectric vibrators are made different from each other.
Public/Granted literature
- US20100052476A1 PIEZOELECTRIC FILTER AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2010-03-04
Information query
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