Invention Grant
- Patent Title: MEMS device and a MEMS device array
- Patent Title (中): MEMS器件和MEMS器件阵列
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Application No.: US12389399Application Date: 2009-02-20
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Publication No.: US08049944B2Publication Date: 2011-11-01
- Inventor: Abdul Jaleel K. Moidu
- Applicant: Abdul Jaleel K. Moidu
- Applicant Address: US CA Milpitas
- Assignee: JDS Uniphase Corporation
- Current Assignee: JDS Uniphase Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Teitelbaum & MacLean
- Agent Neil Teitelbaum; Doug MacLean
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A two-axis tiltable linear array of MEMS micromirrors is described. The individual micromirrors of the array are flexibly suspended over a common substrate by using two pairs of serpentine hinges coupled by a gimbal ring and are actuated by using tilt and roll electrodes. The tilt actuator regions of the micromirrors are disposed within the gimbal rings, the roll hinges connecting the tilt actuator regions to the micromirrors, which provides for decoupling of the tilt and the roll of the micromirror. The structure allows for considerable decoupling of the tilt and the roll and, or the pistoning effects observed upon micromirror actuation. The structure is suitable for application in a wavelength selective optical switch.
Public/Granted literature
- US20100172612A1 MEMS DEVICE AND A MEMS DEVICE ARRAY Public/Granted day:2010-07-08
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