Invention Grant
US08050169B2 Optical scanning device and method for determining focus position 失效
光学扫描装置及确定焦点位置的方法

Optical scanning device and method for determining focus position
Abstract:
The optical scanning device [10] is arranged for scanning a record carrier [1]. The record carrier has an outer face [7]. The scanning device comprises a radiation source [11] for generating a radiation beam [12] and an objective system [25] having an exit face [26] arranged for evanescent coupling of the radiation beam between the exit face and the outer face and for converging the radiation beam to a focus [27]. A tilt measuring system [67, 77] provides a tilt signal [87; 88] representing a tilt angle between the objective system and the record carrier. A control unit [95] determines a distance signal representing a distance between the exit face and the focus from the tilt signal.
Public/Granted literature
Information query
Patent Agency Ranking
0/0