Invention Grant
US08053145B2 Method for manufacturing holographic recording medium and method for manufacturing semiconductor device 有权
全息记录介质的制造方法及半导体装置的制造方法

Method for manufacturing holographic recording medium and method for manufacturing semiconductor device
Abstract:
To provide a method for manufacturing a holographic recording medium and a method for manufacturing a semiconductor device, by which effects of distortion or irregularities of the surface of an exposure object can be reduced. The method includes the steps of: splitting a laser beam emitted from a laser oscillator into a first laser beam and a second laser beam, and forming a fringe pattern in a holographic recording medium by illuminating the holographic recording medium with the first laser beam through a mask and illuminating the holographic recording medium with the second laser beam. The mask is a substrate having a light-shielding film formed over its surface.
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