Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12259732Application Date: 2008-10-28
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Publication No.: US08053268B2Publication Date: 2011-11-08
- Inventor: Mari Otsuka , Hiroyuki Kamijiyo , Hideaki Harakawa
- Applicant: Mari Otsuka , Hiroyuki Kamijiyo , Hideaki Harakawa
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2007-280304 20071029
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A semiconductor device has a semiconductor substrate including a light receiving element, a silicon oxide film formed on the semiconductor substrate, a plurality of wiring interlayer films formed on the silicon oxide film, and each including a wiring layer formed as the result of the fact that copper is buried, and a silicon nitride film formed on the wiring interlayer film of the uppermost layer wherein Si—H concentration is smaller than N—H concentration.
Public/Granted literature
- US20090108388A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-04-30
Information query
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