Invention Grant
- Patent Title: Capacitor-less DRAM device
- Patent Title (中): 无电容DRAM器件
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Application No.: US12603224Application Date: 2009-10-21
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Publication No.: US08053832B2Publication Date: 2011-11-08
- Inventor: Sung-hwan Kim , Yong-chul Oh
- Applicant: Sung-hwan Kim , Yong-chul Oh
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2008-0110487 20081107
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
Provided is a capacitor-less DRAM device including: an insulating layer formed on a semiconductor substrate; a silicon layer formed on the insulating layer, wherein a trench is formed inside the silicon layer; and an offset spacer formed on both sidewalls of the trench and protruded upward through the silicon layer. A gate insulating layer is formed on a bottom of the trench, and a gate electrode is formed to be buried in the gate insulating layer and in the trench and the offset spacer. A source region and a drain region are formed in the silicon layer on both sides of the offset spacer so as not to overlap with the gate electrode. A channel region is formed in the silicon layer below the gate insulating layer to be self-aligned with the gate electrode.
Public/Granted literature
- US20100117147A1 Capacitor-Less DRAM Device Public/Granted day:2010-05-13
Information query
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