Invention Grant
US08053846B2 Field effect transistor (FET) having nano tube and method of manufacturing the FET
有权
具有纳米管的场效应晶体管(FET)及其制造方法
- Patent Title: Field effect transistor (FET) having nano tube and method of manufacturing the FET
- Patent Title (中): 具有纳米管的场效应晶体管(FET)及其制造方法
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Application No.: US11826170Application Date: 2007-07-12
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Publication No.: US08053846B2Publication Date: 2011-11-08
- Inventor: Seung-Nam Cha , Jae-Eun Jang , Jae-Eun Jung , Yong-Wan Jin , Byong-Gwon Song
- Applicant: Seung-Nam Cha , Jae-Eun Jang , Jae-Eun Jung , Yong-Wan Jin , Byong-Gwon Song
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2006-0117919 20061127
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
A transistor includes: a semiconductor substrate; a channel region arranged on the semiconductor substrate; a source and a drain respectively arranged on either side of the channel region; and a conductive nano tube gate arranged on the semiconductor substrate to transverse the channel region between the source and the drain. Its method of manufacture includes: arranging a conductive nano tube on a surface of a semiconductor substrate; defining source and drain regions having predetermined sizes and traversing the nano tube; forming a metal layer on the source and drain regions; removing a portion of the metal layer formed on the nano tube to respectively form source and drain electrodes separated from the metal layer on either side of the nano tube; and doping a channel region below the nano tube arranged between the source and drain electrodes by ion-implanting.
Public/Granted literature
- US20080150043A1 Field Effect Transistor (FET) having nano tube and method of manufacturing the FET Public/Granted day:2008-06-26
Information query
IPC分类: