Invention Grant
- Patent Title: Low resistance and reliable copper interconnects by variable doping
- Patent Title (中): 低电阻和可靠的铜互连可变掺杂
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Application No.: US11341827Application Date: 2006-01-27
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Publication No.: US08053892B2Publication Date: 2011-11-08
- Inventor: Ting-Chu Ko , Ming-Hsing Tsai , Chien-Hsueh Shih
- Applicant: Ting-Chu Ko , Ming-Hsing Tsai , Chien-Hsueh Shih
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A method and system is provided for efficiently varying the composition of the metal interconnects for a semiconductor device. A metal interconnect according to the present disclosure has an intermediate layer on a dielectric material, the intermediate layer having a relatively higher concentration of an impurity metal along with a primary metal, the impurity metal having a lower reduction potential than the primary metal. The metal interconnect has a main layer of the metal alloy interconnect on top of the intermediate layer and surrounded by the intermediate layer, the main layer having a relatively higher concentration of the primary metal than the intermediate layer, wherein the intermediate and main layers of the metal alloy interconnect each maintains a material uniformity.
Public/Granted literature
- US20070054488A1 Low resistance and reliable copper interconnects by variable doping Public/Granted day:2007-03-08
Information query
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