Invention Grant
- Patent Title: Method and system for forming conductive bumping with copper interconnection
- Patent Title (中): 用铜互连形成导电凸块的方法和系统
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Application No.: US12258956Application Date: 2008-10-27
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Publication No.: US08053907B2Publication Date: 2011-11-08
- Inventor: De Yuan Xiao , Guo Qing Chen
- Applicant: De Yuan Xiao , Guo Qing Chen
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN Shanghai
- Agency: Kilpatrick Townsend and Stockton LLP
- Priority: CN200810040739 20080715
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/48 ; H01L29/40

Abstract:
An integrated circuit system with one or more copper interconnects is provided. The one or more copper interconnects are in conductive contact with a substrate. The integrated circuit system includes a first dielectric layer, a copper material filling a first via through the first dielectric layer, a second dielectric layer in contact with the first dielectric layer, and a diffusion barrier layer. The diffusion barrier layer at least partially fills a second via through the second dielectric layer. At least a first part of the diffusion barrier layer is in direct contact with the copper material, and at least a second part of the diffusion barrier layer is in direct contact with the second dielectric layer. The integrated circuit system further includes a gold material at least partially filling the second via. The gold material is conductively connected with the copper material through the diffusion barrier layer and conductively connected with a substrate. Additionally, a method for making such an integrated circuit system with one or more copper interconnects is provided.
Public/Granted literature
- US20100013100A1 Method and System for Forming Conductive Bumping with Copper Interconnection Public/Granted day:2010-01-21
Information query
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