Invention Grant
- Patent Title: Linear motor, stage apparatus and exposure apparatus
- Patent Title (中): 直线电机，平台装置和曝光装置
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Application No.: US11795518Application Date: 2006-01-20
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Publication No.: US08053937B2Publication Date: 2011-11-08
- Inventor: Katsushi Nakano , Shigeru Morimoto , Shigeki Kageyama
- Applicant: Katsushi Nakano , Shigeru Morimoto , Shigeki Kageyama
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2005-013824 20050121
- International Application: PCT/JP2006/300827 WO 20060120
- International Announcement: WO2006/077958 WO 20060727
- Main IPC: H02K41/02
- IPC: H02K41/02
Abstract:
A linear motor is equipped with a coil body (62), and a yoke (71) that supports a magnetism generating body (72) and that moves relative to the coil body (62). The yoke (71) has a first portion (73) that is formed from a magnetic material and disposed based on the saturation state of the magnetic field, which is generated by the magnetism generating body (72), in the yoke (71).
Public/Granted literature
- US20080265688A1 Linear Motor, Stage Apparatus and Exposure Apparatus Public/Granted day:2008-10-30
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