Invention Grant
US08053958B2 Piezoelectric resonator element, piezoelectric resonator, and acceleration sensor 有权
压电谐振元件,压电谐振器和加速度传感器

Piezoelectric resonator element, piezoelectric resonator, and acceleration sensor
Abstract:
A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions.
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