Invention Grant
US08054326B2 Laser exposure device and optical axis adjustment method in laser exposure device
有权
激光曝光装置中的激光曝光装置和光轴调整方法
- Patent Title: Laser exposure device and optical axis adjustment method in laser exposure device
- Patent Title (中): 激光曝光装置中的激光曝光装置和光轴调整方法
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Application No.: US12477961Application Date: 2009-06-04
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Publication No.: US08054326B2Publication Date: 2011-11-08
- Inventor: Takeshi Endo , Takahiro Kojima , Kazutoshi Takahashi
- Applicant: Takeshi Endo , Takahiro Kojima , Kazutoshi Takahashi
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba,Toshiba Tec Kabushiki Kaisha
- Current Assignee: Kabushiki Kaisha Toshiba,Toshiba Tec Kabushiki Kaisha
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Turocy & Watson, LLP
- Priority: JP2006-043115 20060220
- Main IPC: B41J2/44
- IPC: B41J2/44

Abstract:
In a laser exposure device according to the present invention, a positioning pin, which is formed in a lens holder supporting a lens system, is inserted through an elongated hole for restriction of a board holder supporting a laser diode. An eccentric cam is inserted into an elongated hole for rotation movement formed in a board holder and a circular hole for rotation movement which is formed in the lens holder and which faces the elongated hole for rotation movement. An eccentric cam is inserted into an elongated hole for slide movement formed in the board holder and a circular hole for slide movement which is formed in the lens holder and which faces the elongated hole for slide movement. The eccentric cams are rotated to relatively move the board holder and lens holder with respect to each other to thereby establish alignment between the optical axes of the laser diode and lens system. In a state where the eccentric cams are fitted into the elongated holes, the board holder and lens holder are fixed to each other by screws.
Public/Granted literature
- US20090238605A1 LASER EXPOSURE DEVICE AND OPTICAL AXIS ADJUSTMENT METHOD IN LASER EXPOSURE DEVICE Public/Granted day:2009-09-24
Information query
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