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US08054527B2 Adjustably transmissive MEMS-based devices 失效
可调透射的基于MEMS的器件

Adjustably transmissive MEMS-based devices
Abstract:
Modulator devices are selectably adjustable between at least two states, wherein the transmission and/or reflection of particular wavelengths of light are modified. Certain modulator devices are substantially uniformly adjustable over a wide range of wavelengths, including visible and infrared wavelengths. Other modulator devices are adjustable over visible wavelengths without significantly affecting infrared wavelengths. In addition, the modulator devices may be used in conjunction with fixed thin film reflective structures.
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