Invention Grant
US08054583B2 Ta/W film as heating device for dynamic fly height adjustment
有权
Ta / W薄膜作为动态飞行高度调节的加热装置
- Patent Title: Ta/W film as heating device for dynamic fly height adjustment
- Patent Title (中): Ta / W薄膜作为动态飞行高度调节的加热装置
-
Application No.: US12215825Application Date: 2008-06-30
-
Publication No.: US08054583B2Publication Date: 2011-11-08
- Inventor: Min Zheng , Min Li , Chen-Jung Chien , Kowang Liu , Sung Chung
- Applicant: Min Zheng , Min Li , Chen-Jung Chien , Kowang Liu , Sung Chung
- Applicant Address: US CA Milpitas
- Assignee: Headway Technologies, Inc.
- Current Assignee: Headway Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: G11B5/147
- IPC: G11B5/147

Abstract:
A dynamic fly heater (DFH) for improved lifetime and better film uniformity is disclosed for a magnetic head. The heater has a lower amorphous Ta layer and an upper W layer to promote small grain size and reduced electro-migration. The composite film is especially advantageous for heaters greater than 1000 Angstroms thick where dR/R is difficult to control in the prior art. The DFH may be a (Ta/W)n laminate in which the Ta layers are about 30 Angstroms thick and the combined thickness of the W layers is from 400 to 1200 Angstroms. A Ta film is preferably sputter deposited with an Ar pressure of 3 to 5 mTorr and the W film is sputter deposited in the same chamber with a 3 to 20 mTorr Ar pressure. In one embodiment, a merged read/write head has one DFH in the read head and a second DFH in the write head.
Public/Granted literature
- US20090323227A1 Ta/W film as heating device for dynamic fly height adjustment Public/Granted day:2009-12-31
Information query
IPC分类: