Invention Grant
- Patent Title: Multipoint voltage and current probe system
- Patent Title (中): 多点电压和电流探头系统
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Application No.: US11763298Application Date: 2007-06-14
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Publication No.: US08055203B2Publication Date: 2011-11-08
- Inventor: Ray Choueiry , Todd Heckleman , David J. Coumou
- Applicant: Ray Choueiry , Todd Heckleman , David J. Coumou
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H04B17/00
- IPC: H04B17/00 ; H01J7/24

Abstract:
A metrology system monitors radio frequency (RF) power at a plurality of locations in a circuit. The system includes a plurality of RF sensors that generate respective analog signals based on electrical properties of the RF power, a multiplexing module that generates an output signal based on the analog signals, and an analysis module that generates messages based on the output signal. The messages contain information regarding the electrical properties that are sensed by the plurality of RF sensors.
Public/Granted literature
- US20080227420A1 Multipoint Voltage and Current Probe System Public/Granted day:2008-09-18
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