Invention Grant
US08055368B2 Control device and control method of plasma processing system, and storage medium storing control program
有权
等离子体处理系统的控制装置和控制方法以及存储控制程序的存储介质
- Patent Title: Control device and control method of plasma processing system, and storage medium storing control program
- Patent Title (中): 等离子体处理系统的控制装置和控制方法以及存储控制程序的存储介质
-
Application No.: US12496137Application Date: 2009-07-01
-
Publication No.: US08055368B2Publication Date: 2011-11-08
- Inventor: Kiyohito Iijima , Hiroaki Mochizuki
- Applicant: Kiyohito Iijima , Hiroaki Mochizuki
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-181700 20080711
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
In a control device of a plasma processing system, a storage unit is configured to store a reference recipe indicating an order of the plasma processing. An operation unit calculates a state variation value of each of the plasma processing devices by a predetermined timing at a plurality of processing lot intervals. A table generation unit generates an adjusting table for adjusting the reference recipe from the calculated state variation value of each of the plasma processing devices. In addition, a process executing control unit adjusts the reference recipe by using one of the generated adjusting tables for the plasma processing devices by the table generation unit and performs the plasma processing on the target object in the corresponding plasma processing device according to an order of the adjusted reference recipe.
Public/Granted literature
Information query