Invention Grant
- Patent Title: Method and apparatus for modifying a ribbon-shaped ion beam
- Patent Title (中): 用于改变带状离子束的方法和装置
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Application No.: US12703194Application Date: 2010-02-10
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Publication No.: US08058626B2Publication Date: 2011-11-15
- Inventor: Kenneth Harry Purser , William H. Park
- Applicant: Kenneth Harry Purser , William H. Park
- Applicant Address: US CA San Jose
- Assignee: Twin Creeks Technologies, Inc.
- Current Assignee: Twin Creeks Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Agency: The Mueller Law Office, P.C.
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J3/26 ; H01L21/265
Abstract:
A ribbon-shaped ion beam having an elongate cross-section normal to a beam direction is modified by generating, at a predetermined position along the ribbon-shaped beam, a magnetic field extending in an x-direction along an x-axis. The x-direction magnetic field has a non-uniform intensity which is a desired function of x.
Public/Granted literature
- US20110114851A1 METHOD AND APPARATUS FOR MODIFYING A RIBBON-SHAPED ION BEAM Public/Granted day:2011-05-19
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