Invention Grant
- Patent Title: Semiconductor memory device including a cylinder type storage node and a method of fabricating the same
- Patent Title (中): 包括圆柱型存储节点的半导体存储器件及其制造方法
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Application No.: US12537461Application Date: 2009-08-07
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Publication No.: US08058678B2Publication Date: 2011-11-15
- Inventor: Gil-Sub Kim , Won-Mo Park , Seong-Ho Kim , Dong-Kwan Yang
- Applicant: Gil-Sub Kim , Won-Mo Park , Seong-Ho Kim , Dong-Kwan Yang
- Applicant Address: KR Suwon-Si
- Assignee: Samsunge Electronics Co., Ltd.
- Current Assignee: Samsunge Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2009-0006979 20090129
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
Provided is a semiconductor memory device including cylinder type storage nodes and a method of fabricating the semiconductor memory device. The semiconductor memory device includes: a semiconductor substrate including switching devices; a recessed insulating layer including storage contact plugs therein, wherein the storage contact plugs are electrically connected to the switching devices and the recessed insulating layer exposes at least some portions of upper surfaces and side surfaces of the storage contact plugs. The semiconductor device further includes cylinder type storage nodes each having a lower electrode. The lower electrode contacting the at least some portions of the exposed upper surfaces and side surfaces of the storage node contact plugs.
Public/Granted literature
- US20100187588A1 SEMICONDUCTOR MEMORY DEVICE INCLUDING A CYLINDER TYPE STORAGE NODE AND A METHOD OF FABRICATING THE SAME Public/Granted day:2010-07-29
Information query
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