Invention Grant
US08058952B2 MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
有权
MEMS谐振器，其制造方法和MEMS振荡器
- Patent Title: MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
- Patent Title (中): MEMS谐振器，其制造方法和MEMS振荡器
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Application No.: US12158986Application Date: 2006-12-18
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Publication No.: US08058952B2Publication Date: 2011-11-15
- Inventor: Jozef T. M. Van Beek , Bart Van Velzen
- Applicant: Jozef T. M. Van Beek , Bart Van Velzen
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP05112943 20051223
- International Application: PCT/IB2006/054930 WO 20061218
- International Announcement: WO2007/072408 WO 20070628
- Main IPC: H03H9/24
- IPC: H03H9/24 ; H03H9/125 ; H03H3/007 ; H03B5/30
Abstract:
The invention relates to a MEMS resonator comprising a first electrode, a movable element (48) comprising a second electrode, the movable element (48) at least being movable towards the first electrode, the first electrode and the movable element (48) being separated by a gap (46, 47) having sidewalls. According to the invention, the MEMS resonator is characterized in that the gap (46, 47) has been provided with a dielectric layer (60) on at least one of the sidewalls.
Public/Granted literature
- US20090121808A1 MEMS RESONATOR, A METHOD OF MANUFACTURING THEREOF, AND A MEMS OSCILLATOR Public/Granted day:2009-05-14
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