- Patent Title: Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
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Application No.: US11281544Application Date: 2005-11-18
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Publication No.: US08059260B2Publication Date: 2011-11-15
- Inventor: Masahiko Yasuda , Taro Sugihara
- Applicant: Masahiko Yasuda , Taro Sugihara
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2004-335050 20041118
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/42 ; G03B27/58

Abstract:
A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
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