Invention Grant
- Patent Title: Adaptive signature detection
- Patent Title (中): 自适应签名检测
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Application No.: US13119542Application Date: 2010-05-28
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Publication No.: US08059886B2Publication Date: 2011-11-15
- Inventor: Yong Gao , Junqing Huang , Lisheng Gao
- Applicant: Yong Gao , Junqing Huang , Lisheng Gao
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka, Neely & Graham, P.C.
- International Application: PCT/US2010/036514 WO 20100528
- International Announcement: WO2010/141337 WO 20101209
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
A processor-based method for detecting defects in an integrated circuit, by creating an image of at least a portion of the integrated circuit with a sensor, grouping pixels of the image into bins based at least in part on a common characteristic of the pixels that are grouped within a given bin, creating a histogram of the pixels in each of the bins, calculating a mean value of the histogram for each of the bins, comparing the mean value for each of the bins to a threshold value, flagging as defect candidates those bins where the mean value of the bin varies from the threshold value by more than a predetermined amount, and performing signature detection on the bins that are flagged as defect candidates, where the image of the integrated circuit is not directly compared to any other image of an integrated circuit.
Public/Granted literature
- US20110170766A1 Adaptive Signature Detection Public/Granted day:2011-07-14
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