Invention Grant
- Patent Title: Conductive spacers extended floating gates
- Patent Title (中): 导电间隔物延伸浮动门
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Application No.: US12173440Application Date: 2008-07-15
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Publication No.: US08063429B2Publication Date: 2011-11-22
- Inventor: Antonius Maria Petrus Johannes Hendriks , Josephus Franciscus Antonius Maria Guelen , Guido Jozef Maria Dormans
- Applicant: Antonius Maria Petrus Johannes Hendriks , Josephus Franciscus Antonius Maria Guelen , Guido Jozef Maria Dormans
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP02077452 20020620
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for manufacturing on a substrate a semiconductor device with improved floating-gate to control-gate coupling ratio is described. The method comprises the steps of first forming an isolation zone in the substrate, thereafter forming the floating gate on the substrate, thereafter extending the floating gate using polysilicon spacers, and thereafter forming the control gate over the floating gate and the polysilicon spacers. Such a semiconductor device may be used in flash memory cells or EEPROMs.
Public/Granted literature
- US20080283899A1 CONDUCTIVE SPACERS EXTENDED FLOATING GATES Public/Granted day:2008-11-20
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