Invention Grant
- Patent Title: Backside illuminated imaging sensor with vertical pixel sensor
- Patent Title (中): 背面照明成像传感器与垂直像素传感器
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Application No.: US12260019Application Date: 2008-10-28
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Publication No.: US08063465B2Publication Date: 2011-11-22
- Inventor: Yin Qian , Hsin-Chih Tai , Duli Mao , Vincent Venezia , Howard E. Rhodes
- Applicant: Yin Qian , Hsin-Chih Tai , Duli Mao , Vincent Venezia , Howard E. Rhodes
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L31/0232

Abstract:
A backside illuminated imaging sensor includes a vertical stacked sensor that reduces cross talk by using different silicon layers to form photodiodes at separate levels within a stack (or separate stacks) to detect different colors. Blue light-, green light-, and red light-detection silicon layers are formed, with the blue light detection layer positioned closest to the backside of the sensor and the red light detection layer positioned farthest from the backside of the sensor. An anti-reflective coating (ARC) layer can be inserted in between the red and green light detection layers to reduce the optical cross talk captured by the red light detection layer. Amorphous polysilicon can be used to form the red light detection layer to boost the efficiency of detecting red light.
Public/Granted literature
- US20090200626A1 BACKSIDE ILLUMINATED IMAGING SENSOR WITH VERTICAL PIXEL SENSOR Public/Granted day:2009-08-13
Information query
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