Invention Grant
US08063721B2 Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
有权
微机电系统（MEMS）谐振器及其制造方法
- Patent Title: Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
- Patent Title (中): 微机电系统（MEMS）谐振器及其制造方法
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Application No.: US12639102Application Date: 2009-12-16
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Publication No.: US08063721B2Publication Date: 2011-11-22
- Inventor: Shogo Inaba , Akira Sato
- Applicant: Shogo Inaba , Akira Sato
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2005-332444 20051117; JP2005-332445 20051117; JP2006-261135 20060926
- Main IPC: H03H9/00
- IPC: H03H9/00 ; H03H3/007
Abstract:
A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.
Public/Granted literature
- US20100090786A1 Micro-Electro-Mechanical-System (MEMS) Resonator and Manufacturing Method Thereof Public/Granted day:2010-04-15
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