Invention Grant
US08064067B2 Exposure apparatus and exposure method 有权
曝光装置和曝光方法

Exposure apparatus and exposure method
Abstract:
Disclosed is an exposing apparatus which projects an image of a pattern by a projection optical system, comprising a measuring unit having a sensor which measures a positional relationship between the projection optical system and a member which is positioned in relation to the projection optical system, and a first support device which has a first soft structure and which supports the measuring unit in a hanging manner separately from the projection optical system.
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