Invention Grant
- Patent Title: Exposure apparatus and exposure method
- Patent Title (中): 曝光装置和曝光方法
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Application No.: US12230506Application Date: 2008-08-29
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Publication No.: US08064067B2Publication Date: 2011-11-22
- Inventor: Hideaki Sakamoto
- Applicant: Hideaki Sakamoto
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2005-292186 20051005; JP2006-273493 20061004
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G03B27/42

Abstract:
Disclosed is an exposing apparatus which projects an image of a pattern by a projection optical system, comprising a measuring unit having a sensor which measures a positional relationship between the projection optical system and a member which is positioned in relation to the projection optical system, and a first support device which has a first soft structure and which supports the measuring unit in a hanging manner separately from the projection optical system.
Public/Granted literature
- US20090161082A1 Exposure apparatus and exposure method Public/Granted day:2009-06-25
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