Invention Grant
- Patent Title: Mirror device and MEMS device comprising layered electrode
- Patent Title (中): 镜装置和包括层状电极的MEMS装置
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Application No.: US12590053Application Date: 2009-10-30
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Publication No.: US08064123B2Publication Date: 2011-11-22
- Inventor: Yoshihiro Maeda , Hirotoshi Ichikawa , Naoya Sugimoto , Fusao Ishii
- Applicant: Yoshihiro Maeda , Hirotoshi Ichikawa , Naoya Sugimoto , Fusao Ishii
- Applicant Address: JP JP
- Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee Address: JP JP
- Agent Bo-In Lin
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/08

Abstract:
The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.
Public/Granted literature
- US20100046062A1 Mirror device and MEMS device comprising layered electrode Public/Granted day:2010-02-25
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