Invention Grant
US08064152B2 Supporting device, optical apparatus, exposure apparatus, and device manufacturing method 有权
支撑装置,光学装置,曝光装置和装置制造方法

  • Patent Title: Supporting device, optical apparatus, exposure apparatus, and device manufacturing method
  • Patent Title (中): 支撑装置,光学装置,曝光装置和装置制造方法
  • Application No.: US12876921
    Application Date: 2010-09-07
  • Publication No.: US08064152B2
    Publication Date: 2011-11-22
  • Inventor: Yuji Sudoh
  • Applicant: Yuji Sudoh
  • Applicant Address: JP Tokyo
  • Assignee: Canon Kabushiki Kaisha
  • Current Assignee: Canon Kabushiki Kaisha
  • Current Assignee Address: JP Tokyo
  • Agency: Canon USA Inc IP Division
  • Priority: JP2009-210353 20090911
  • Main IPC: G02B7/02
  • IPC: G02B7/02
Supporting device, optical apparatus, exposure apparatus, and device manufacturing method
Abstract:
The present invention provides a supporting device that supports an optical element, comprising: a first supporting member that is fixed to an outer circumference of the optical element; a plurality of members that is connected to an outer circumference of the first supporting member; and a second supporting member that supports the first supporting member via the plurality of members, wherein each of the plurality of members is configured such that the a rigidity thereof in a first direction inclined relative to a direction orthogonal to an optical axis of the optical element in a plane including the optical axis is lower than a rigidity thereof in each of two directions that are orthogonal to the first direction and that are orthogonal to each other.
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