Invention Grant
- Patent Title: Optical system of an illumination device of a projection exposure apparatus
- Patent Title (中): 投影曝光装置的照明装置的光学系统
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Application No.: US11685620Application Date: 2007-03-13
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Publication No.: US08068279B2Publication Date: 2011-11-29
- Inventor: Karl-Heinz Schuster , Juergen Hartmaier , Manfred Maul , Dieter Schmerek , Detlev Mueller , Otto Hahnemann , Frank Marianek , Gundula Weiss , Damian Fiolka
- Applicant: Karl-Heinz Schuster , Juergen Hartmaier , Manfred Maul , Dieter Schmerek , Detlev Mueller , Otto Hahnemann , Frank Marianek , Gundula Weiss , Damian Fiolka
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006012034 20060314
- Main IPC: G02B5/30
- IPC: G02B5/30

Abstract:
The disclosure relates to an optical system of an illumination device of a microlithographic projection exposure apparatus, including at least one first light-conductance-increasing element having a plurality of diffractively or refractively beam-deflecting structures extending in a common first preferred direction the light-conductance-increasing element having an optically uniaxial crystal material in such a way that the optical crystal axis of the crystal material is substantially parallel or substantially perpendicular to the first preferred direction.
Public/Granted literature
- US20070217013A1 OPTICAL SYSTEM OF AN ILLUMINATION DEVICE OF A PROJECTION EXPOSURE APPARATUS Public/Granted day:2007-09-20
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