Invention Grant
US08068279B2 Optical system of an illumination device of a projection exposure apparatus 有权
投影曝光装置的照明装置的光学系统

Optical system of an illumination device of a projection exposure apparatus
Abstract:
The disclosure relates to an optical system of an illumination device of a microlithographic projection exposure apparatus, including at least one first light-conductance-increasing element having a plurality of diffractively or refractively beam-deflecting structures extending in a common first preferred direction the light-conductance-increasing element having an optically uniaxial crystal material in such a way that the optical crystal axis of the crystal material is substantially parallel or substantially perpendicular to the first preferred direction.
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